A dedicated sample stage is a very useful additon to any deposition system. It allows the operator to introduce the sample into the vacuum system with minimal preparation and effort. Furthermore, it ensures that the coatings are uniform, reproducible and the deposition process can be enhanced by extra supplied functionality of the stage.
We manufacture a range of sample stages which is designed to support a variety of PVD processes. The sample stages have many standard functional features such as rotation and heating, and in addition, we may offer a custom solution for your sample size and temperature range.
Every sample stage is constructed to the exact specifications in order to produce a perfect fit for every system.
The sample stage is constructed from SS304 stainless steel and is usually fitted on a NW200CF flange. All parts subjected to extensive heating are made from Molybdenum. In addition, the stage is fitted with an external Mo shielding for protection during deposition of very thick coatings. The shielding is simple to remove and easy to maintain.
Sample Rotation Typically sample rotation is required if the resulting film uniformity should be in the range of +/-5% or better across the wafer.
The rotation capability is delivered by a rotation motor, which is fitted directly on the sample stage main shaft and is controlled via in-house built controller. The stage rotation control speed is set by turning the rotary dial on the controller to the desired setting.
The rotation motor comes in three separate models: 2-20rpm, 20-60rpm and 20-80rpm.
Sample Heating The sample stage is fitted with SiC graphite heater, which provides extremely stable heating of the wafer for an extended period of time. The SiC heater element itself posseses excellent thermal and physical shock resistance and can be used in oxygen-rich atmosphere.
The internally fitted K-type thermocouple is located at the back of the sample and is engineered to measure the sample temperature in its close vicinity. The heating temperature is controlled by using the Eurotherm controller. The graph below shows how the measured temperature of the sample stage follows the settings of the Eurotherm controller.