The QUBE series deposition system is based on a front-loading box-type chamber based upon a six faceted frame machined from stainless steel and 5 interchangeable panels, which can be easily swapped around to achieve the desired system configuration. By replacing one panel with an optional sliding door, this allows the system to be easily adapted to a Glovebox.
Depending on the type of the panel, it may serve as a chamber wall (blank panel), a viewport (viewport panel), a deposition source (source panel), a QCM (QCM panel) or a pump and pressure gauge panel.
Base ports are confocal as standard allowing a wider variety of deposition sources to be employed than with non-confocal arrangements. The system is equipped as standard with a 265ls-1 turbo pump, but alternative pumping speed or types can be specified (e.g. 430 ls-1 or 685 ls-1). An optional available throttle valve for sputtering processes is also available.
When pumping down the system with a 265ls-1 turbo pump, the base pressure reaches a guaranteed value of 5.0 x 10-6 mbar in just 15 minutes. The QUBE’s ultimate base vacuum pressure is 1 x10-7 mbar.
The QUBE deposition system fits perfectly in a laboratory, which makes it the ideal tool for a lot of routine deposition processes, for small scale teaching laboratories, attached to a glove box or clean rooms where the available space is limited.
Routine Sample Preparation, Sputtering, E-Beam and Thermal Evaporation