| -Remote control (HV, emission, focus, XY deflection) included -RoHS compliant -With interlock safety mechanism -Magnetic shield (option) can be added- Differential exhaust port (option) can be added- High durability and reliability (Safety) ・ High brightness beam spot ・ Compatible with kSA400 RHEED image / video analysis system |
 * The appearance and specifications are subject to change without notice for improvement. please note that. |
| Model | RDA-004G |
| Beam spot diameter | φ90μm |
| filament | φ0.1mm tungsten wire hairpin type |
| Wehnelt | Self bias type |
| Convergent lens | Air core type electromagnetic lens |
| Deflection lens | Toroidal electromagnetic lens |
| Axis alignment mechanism | Filament, Wehnelt alignment |
| Isolation voltage | DC30KV |
| Allowable leak volume | <1.33 × 10 -11 Pa ・ m 3 / sec |
| Baking temperature | <200 ℃ |
| Mounting flange | ICF70 (2.75 "OD) |
| Outer diameter | φ100 × 401mm |
| Model | RDA-004P |
| Acceleration voltage | 0 to 30KV constant voltage power supply 160μA ripple 0.03% or less (120μA limit) |
| Filament power supply | 0-5V constant voltage power supply 2A (MAX) ripple 0.05% or less |
| Deflection lens power supply | ± 1A constant current power supply ± 1V ripple 0.05% or less |
| Convergent lens power supply | ± 0 to 1.5A constant current power supply 0 to 22V ripple 0.05% or less |
| Outer diameter | 480 x 199 x 500mm (+ cable 100mm) |
High performance kSA400 RHEED analysis system The
kSA400 RHEED analysis system is awell-designed integrated hardware and software product forevaluating and analyzing crystalline thin film surfaces.
Many features of the kSA400 system are impossible with any other product in the world.
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