-Remote control (HV, emission, focus, XY deflection) included -RoHS compliant -With interlock safety mechanism -Magnetic shield (option) can be added- Differential exhaust port (option) can be added- High durability and reliability (Safety) ・ High brightness beam spot ・ Compatible with kSA400 RHEED image / video analysis system |
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Model | RDA-004G |
Beam spot diameter | φ90μm |
filament | φ0.1mm tungsten wire hairpin type |
Wehnelt | Self bias type |
Convergent lens | Air core type electromagnetic lens |
Deflection lens | Toroidal electromagnetic lens |
Axis alignment mechanism | Filament, Wehnelt alignment |
Isolation voltage | DC30KV |
Allowable leak volume | <1.33 × 10 -11 Pa ・ m 3 / sec |
Baking temperature | <200 ℃ |
Mounting flange | ICF70 (2.75 "OD) |
Outer diameter | φ100 × 401mm |
Model | RDA-004P |
Acceleration voltage | 0 to 30KV constant voltage power supply 160μA ripple 0.03% or less (120μA limit) |
Filament power supply | 0-5V constant voltage power supply 2A (MAX) ripple 0.05% or less |
Deflection lens power supply | ± 1A constant current power supply ± 1V ripple 0.05% or less |
Convergent lens power supply | ± 0 to 1.5A constant current power supply 0 to 22V ripple 0.05% or less |
Outer diameter | 480 x 199 x 500mm (+ cable 100mm) |
High performance kSA400 RHEED analysis system The


well-designed integrated hardware and software product forevaluating and analyzing crystalline thin film surfaces.
Many features of the kSA400 system are impossible with any other product in the world.


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