Q Series Advanced UHV PVD
BASE CHAMBER CONFIGURATION
The QPrep series systems are based on a UHV, conflat flange platform. This allows true UHV to be achieved whilst providing excellent chamber access through the large top-flange. All joints are internally welded and polished to reduce to an absolute minimum any outgassing.
The main chamber is mounted on a stable framework equipped with transport casters for easy transportation and placement in the laboratory.
Base ports are confocal as standard allowing a wider variety of deposition sources to be employed than with nonconfocal arrangements. In addition, the chamber design features a wide range of other ports. We can also manufacture bespoke vacuum chambers on request.
The system can be equipped with turbo pumps ranging from 300 to 1200ls-1 .
Typical base pressure without bakeout is 5x10-8 mbar.
This can be further improved by adding an internal bakeout lamp or an external bakeout tent.