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M Series MBE Systems

Key Features
  • Cylindrical, true UHV-construction chamber
  • Analysis, load-lock and viewing ports
  • Multiple UHV, CF deposition ports
  • Turbo, ion
  • Range of turbo,ion and cryo pumping options
  • Multiple sample holders

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Chamber configuration
The M600 system is based on a UHV, conflat flange platform with a large metal-sealed top flange. This allows true UHV to be achieved while granting excellent chamber access through the large top-flange. All joints are internally welded and polished on request to reduce to an absolute minimum any outgassing.
Ports:Base ports are confocal as standard allowing a wider variety of deposition sources to be employed than with non-confocal arrangements. Two side-mounting ports for high-power e-beam sources can be specified while still leaving up to seven confocal deposition ports in the base. Numerous ports are provided for gauges and analysis tools.
Cryopanel:The system can be equipped with cryogenically-cooled panels to aid pumping and avoid thermal cross-talk between sources.
Bakeout:Internal bakeout heaters or full external bakeout tents can be incorporated, which allow the -10 base pressure to attain a value of less than 1.0x10 Torr with appropriate pumping.
Pumping:M600 can be equipped with pumps ranging -1 from 300 to 2000ls turbo pumps, cryo and ion pumps,but alternative pump types can be specified.
Shielding:The chamber can optionally be equipped with removable cross-contamination shielding in applications where high rates of deposition are required.